Axel
Scherer
Bernard
A. Neches Professor of Electrical Engineering, Applied Physics,
and Physics; Co-Director, Kavli Nanoscience Institute
B.S., New Mexico Institute of Mining and Technology,
1981
M.S., New Mexico Institute of Mining and Technology, 1982
Ph.D., New Mexico Institute of Mining and Technology, 1985
1200
East California Boulevard, MS 200-36
Pasadena, CA 91125 USA
(626) 395-4691 (office)
(626) 577-8442 (fax)
etcher@caltech.edu
Research
Today,
we can produce structures with lateral sizes as small as 6 nm
by combining electron beam lithography and dry etching. Dr. Scherer's
research laboratory is built around producing such nanostructures
and applying them to new optelectonic, magneto-optic, and high-speed
electronic devices. The aim of his research group is to develop
functional devices which use their reduced geometries to obtain
higher speed, greater efficiencies, and which can be integrated
into systems in large numbers. Successful integration of such
devices in large numbers requires detailed understanding and optimization
of both the individual processing steps as well as the device
performance.
